2/19/2011	1:48:24 PM	Helium valve opened
2/19/2011	1:48:27 PM	Helium MFC set to  500.000000
2/19/2011	1:48:42 PM	Helium valve closed
2/19/2011	1:48:43 PM	Helium valve opened
2/19/2011	1:48:43 PM	Helium valve closed
2/19/2011	1:56:02 PM	Bypass valve closed
2/19/2011	1:56:03 PM	Bypass valve opened
2/19/2011	1:56:05 PM	Helium valve opened
2/19/2011	2:00:50 PM	SiCl4 MFC set to  100.000000
2/19/2011	2:00:54 PM	SiCl4 pre valve opened
2/19/2011	2:01:24 PM	SiCl4 pre valve closed
2/19/2011	2:01:25 PM	Helium valve closed
2/19/2011	2:01:26 PM	Bypass valve closed
2/19/2011	2:01:27 PM	Main Vac valve closed
2/19/2011	2:01:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2011	2:01:42 PM	Recipe started at 2:01 PM
2/19/2011	2:01:42 PM	H2 valve closed
2/19/2011	2:01:42 PM	BCl3 valve closed
2/19/2011	2:01:42 PM	PH3 valve closed
2/19/2011	2:01:42 PM	SiCl4 pre valve closed
2/19/2011	2:01:42 PM	SiCl4 post valve closed
2/19/2011	2:01:42 PM	Main Vac valve closed
2/19/2011	2:01:42 PM	Bypass valve closed
2/19/2011	2:01:42 PM	Bubbler valve closed
2/19/2011	2:01:42 PM	Helium valve opened
2/19/2011	2:01:42 PM	Helium MFC set to  500.000000
2/19/2011	2:01:42 PM	H2 MFC set to  0.000000
2/19/2011	2:01:42 PM	BCl3 MFC set to  0.000000
2/19/2011	2:01:42 PM	PHl3 MFC set to  0.000000
2/19/2011	2:01:42 PM	SiCl4 MFC set to  0.000000
2/19/2011	2:01:42 PM	Bypass solenoid MFC set to  0.000000
2/19/2011	2:01:42 PM	Tube furnace set to 0
2/19/2011	2:02:47 PM	Helium valve closed
2/19/2011	2:02:47 PM	H2 valve closed
2/19/2011	2:02:47 PM	BCl3 valve closed
2/19/2011	2:02:47 PM	PH3 valve closed
2/19/2011	2:02:47 PM	SiCl4 pre valve closed
2/19/2011	2:02:47 PM	SiCl4 post valve closed
2/19/2011	2:02:47 PM	Main Vac valve closed
2/19/2011	2:02:47 PM	Bypass valve closed
2/19/2011	2:02:47 PM	Bubbler valve closed
2/19/2011	2:02:47 PM	Helium MFC set to  0.000000
2/19/2011	2:02:47 PM	H2 MFC set to  0.000000
2/19/2011	2:02:47 PM	BCl3 MFC set to  0.000000
2/19/2011	2:02:47 PM	PHl3 MFC set to  0.000000
2/19/2011	2:02:47 PM	SiCl4 MFC set to  0.000000
2/19/2011	2:02:47 PM	Bypass solenoid MFC set to  0.000000
2/19/2011	2:02:47 PM	Tube furnace set to 0
2/19/2011	2:02:47 PM	Run finished at 2:02 PM
2/19/2011	2:02:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2011	2:27:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2011	2:27:14 PM	Recipe started at 2:27 PM
2/19/2011	2:27:14 PM	Helium valve closed
2/19/2011	2:27:14 PM	H2 valve closed
2/19/2011	2:27:14 PM	BCl3 valve closed
2/19/2011	2:27:14 PM	PH3 valve closed
2/19/2011	2:27:14 PM	SiCl4 pre valve closed
2/19/2011	2:27:14 PM	SiCl4 post valve closed
2/19/2011	2:27:14 PM	Main Vac valve closed
2/19/2011	2:27:14 PM	Bubbler valve closed
2/19/2011	2:27:14 PM	Bypass valve opened
2/19/2011	2:27:14 PM	Helium MFC set to  0.000000
2/19/2011	2:27:14 PM	H2 MFC set to  0.000000
2/19/2011	2:27:14 PM	BCl3 MFC set to  0.000000
2/19/2011	2:27:14 PM	PHl3 MFC set to  0.000000
2/19/2011	2:27:14 PM	SiCl4 MFC set to  0.000000
2/19/2011	2:27:14 PM	Bypass solenoid MFC set to  0.000000
2/19/2011	2:27:15 PM	Tube furnace set to 0
2/19/2011	2:27:37 PM	Helium valve closed
2/19/2011	2:27:37 PM	H2 valve closed
2/19/2011	2:27:37 PM	BCl3 valve closed
2/19/2011	2:27:37 PM	PH3 valve closed
2/19/2011	2:27:37 PM	SiCl4 pre valve closed
2/19/2011	2:27:37 PM	SiCl4 post valve closed
2/19/2011	2:27:37 PM	Bubbler valve closed
2/19/2011	2:27:37 PM	Main Vac valve opened
2/19/2011	2:27:37 PM	Bypass valve opened
2/19/2011	2:27:37 PM	Helium MFC set to  0.000000
2/19/2011	2:27:37 PM	H2 MFC set to  0.000000
2/19/2011	2:27:37 PM	BCl3 MFC set to  0.000000
2/19/2011	2:27:37 PM	PHl3 MFC set to  0.000000
2/19/2011	2:27:37 PM	SiCl4 MFC set to  0.000000
2/19/2011	2:27:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2011	2:27:37 PM	Tube furnace set to 0
2/19/2011	2:27:38 PM	Run finished at 2:27 PM
2/19/2011	2:27:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2011	2:30:22 PM	Helium MFC set to  0.000000
2/19/2011	2:30:23 PM	Helium valve opened
2/19/2011	2:30:27 PM	Helium MFC set to  500.000000
2/19/2011	2:30:38 PM	SiCl4 MFC set to  100.000000
2/19/2011	2:31:47 PM	SiCl4 pre valve opened
2/19/2011	2:31:55 PM	SiCl4 post valve opened
2/19/2011	9:21:42 PM	SiCl4 pre valve closed
2/19/2011	9:21:42 PM	SiCl4 post valve closed
2/19/2011	9:21:43 PM	Helium valve closed
2/19/2011	9:21:46 PM	Main Vac valve closed
2/19/2011	9:21:47 PM	Bypass valve closed
2/19/2011	9:21:56 PM	Helium valve opened
2/19/2011	9:22:03 PM	Helium valve closed
2/19/2011	9:22:51 PM	Helium valve opened
2/19/2011	9:22:52 PM	Helium valve closed
2/19/2011	9:22:53 PM	Helium valve opened
2/19/2011	9:23:10 PM	Helium valve closed
2/19/2011	9:23:13 PM	SiCl4 post valve opened
2/19/2011	9:23:14 PM	SiCl4 post valve closed
2/19/2011	9:23:15 PM	SiCl4 pre valve opened
2/19/2011	9:23:16 PM	SiCl4 pre valve closed
2/19/2011	9:23:31 PM	Helium valve opened
2/19/2011	9:23:37 PM	Helium valve closed
2/19/2011	9:23:39 PM	Bypass valve opened
2/19/2011	9:23:55 PM	Main Vac valve opened
2/19/2011	9:23:58 PM	Helium valve opened
2/19/2011	9:24:04 PM	SiCl4 post valve opened
2/19/2011	9:24:07 PM	SiCl4 pre valve opened
2/19/2011	9:24:10 PM	SiCl4 pre valve closed
2/19/2011	9:24:30 PM	SiCl4 pre valve opened
